--On this work we grew nanostructure thin films of NbxSiyNz on stainless steel AISI304 by the UBM technique with different contents of Si. The microstructure was analyzed by X ray diffraction (XRD) and chemical composition was identified by X-ray photoelectron spectroscopy (XPS). The hardness was calculated by using a nanoindentor and finally the corrosion resistance was studied by electrochemical impedance spectroscopy (EIS) on a NaCl 3% solution. The addition of Si on the NbN thin films produced a microstructure change for contents over 5% of Si by the transition from crystalline to an amorphous phase. The chemical analysis showed the existence of a-Si3N4 and NbN. The hardness was improved by the addition of Si into the process from 18 GPa to 29 GPa. Finally, corrosion properties were evaluated in order to establish the effect of the thin films as a protection barrier on the stainless steel AISI304, besides, we corroborate the corrosion mechanism in the process according to the Si quantity, as a result, the thin films with the highest amount of Si yield better corrosion resistance.